Syllabus
Students will get basic of probe, optical and corpuscular plasma diagnostics methods with an emphasis given mainly to the evaluation of the fundamental characteristics of discharges during a deposition of modification of surfaces. The topic covered are: 1) Determination of densities of charged particles by mass spectrometry and probe methods 2) Determination of densities of neutral species by optical and corpuscular diagnostics methods 3) Evaluation of energetic distributions of charged particles
Determination of temperature of neutral species in the processing plasma.
Annotation
In the course of this seminar is going to be given on concrete examples an overview of diagnostics methods used for the evaluation of fundamental characteristics of discharges during deposition and modification of surfaces.