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Vacuum Technology

Class at Faculty of Mathematics and Physics |
NEVF105

Syllabus

Requirements for materials accepting in vacuum systems. Construction materials, isolators, elastomers.

Methods of treatment and coupling of vacuum materials. Cleaning and maintenance of vacuum apparatus.

Methods of low pressure production, positive displacement pumps, momentum exchange pumps and capture pumps. Mechanical pumps, rotary vane pump, Root's pump, "dry" pumps. Turbomolecular pump, drag stage. Diffusion pump, oil backstreaming, traps.

Fundamentals of cryotechnology, cryogenic pump. Cryosorption pump. Titanium sublimation pump, ion pump, non-evaporable getter pump.

Methods of low pressure measurement, total and partial pressure. Vacuum gauges fundamental properties and characteristics. Direct-reading gauges, Bourdon and diaphragm gauges, capacitance manometer. Indirect-reading gauges, Thermocouple gauge, Pirani gauge, Penning gauge, hot cathode ionisation gauge.

Partial pressure measurement. Mass spectrometers, residual gas analysers. Quadrupole, time-of-flight spectrometer.

Methods of leak detection, helium leak detector. Leak detection with indirect-reading vacuum gauges.

Components of vacuum systems. Flanges, demountable joints and seals. Valves, connecting components, motion and electric feedthroughs, windows.

Basic vacuum systems, operation, troubleshooting and maintenance.

Annotation

Brief information about application of vacuum technology to physical experiments and some industrial branches. Physical basis of vacuum technology.

Vacuum pumps and gauges. High vacuum and ultra high vacuum systems.

Leaks and leak detectors. Materials for vacuum systems.

Hints on the operation of vacuum apparatus.