Syllabus
*
1. Introduction Vacuum, historical remarks. Application of vacuum physics in research and technology. *
2. Kinetic theory of gases Properties of gases, general gas law, Dalton's law. Kinetic theory, molecule in kinetic theory, ideal gas. Maxwell-Boltzman's distribution of velocities, mean values of molecule velocities and energies. Kinetic explanation of gas pressure, pressure and concentration of molecules, equation of state for ideal gas, amount of gas. Mixture of gases, partial pressure. Collisions of molecules, mean free path, absorption of particle beam by a gas, frequency ofmolekule impacts on surface. Viscose and molecular conception of gas, characteristic dimension of system, Knudsen's number. Dimension of a molecule. Ideal and real gases, Van-der-Wals' equation of state. *
3. Elementary gas transport phenomena Transport of energy, impulse and mass through gas. Thermal conductivity, relationship between coefficient of thermal conductivity and gas pressure, accommodation coefficient. Internal friction in gases, relationship between viscosity and gas pressure. Diffusion in gases. Gas flow, viscous and molecular concept. Vacuum conductivity, calculation of conductamce of an orifice and a pipe. Effusion, thermal transpiration. *
4. Gas interaction with solids Solubility of gases in condensed matter, diffusion of gases in solids, permeation, relation between solubility and permeation coefficient. Vaporisation, condensation, pressure of saturated vapours, evaporation rate. Specular and diffused reflection, adsorption. Molecular binding energy, adsorption heat, average residence time of a molecule on a surface, physisorption and chemisorption. Kinetic of sorption, adsorption and desorption flow, state of equilibrium, adsorption isotherm. Monolayer adsorption, Henry's law, sticking coefficient,. Langmuir's isotherm. Multilayer adsorbtion, BET isotherm. *
5. Characteristics of vacuum system Pumping speed, decrease of pressure during pumping, sources of gases, ultimate pressure, outgassing of vacuum systems.
Annotation
Introduction to study of vacuum physics and vacuum science. Basic imagination about vacuum.
Kinetic description of gas at low pressures, interaction of gas with surface, sorption, permeation, solution of gases in solid. Physical principle of methods for obtaining and measurement of low pressures.