Syllabus
* 1. Basic methods of nanotechnology.
Vacuum evaporation (basic ideas, construction of evaporators , evaporation of alloys and compounds, electron beam evaporation, MBE). Sputtering (basic ideas, sputtering systems, magnetron). Laser ablation. In-situ diagnostic.
CVD (decomposition, disproporciation, transport reactions), VLPCVD, PECVD, MOVPE. Anodic oxidation, LB films, molekular structures. Growt of 3D nanostructures by Focused Ion Beam (FIB-CVD)
* 2. Preparation techniques of metal nanocrystalline materials.
Methods and techniques of grain refinement in metallic materials, equal channel angular pressing (ECAP), high pressure torsion (HPT), acummulative roll-bonding (ARB), multi-directional forging, cyclic extrusion and compression, twist extrusion, inert gas condensation, ball-milling, powder metallurgy.
* 3.Growth of nanostructures.
Basic processes at deposition . Adsorption. Adatom movement in a surface potentia l- surface diffusion. Interaction of adatoms and clusters. The role of steps, defects and dopants.
Modes and phases of growth. Steady state nucleation theory. Kinetic equation of the growth. Thin film growth simulations. Kinetic versus thermodynamic.. Amorphous, polycrystalline a epitaxial films. The role of the stress? coherent Stranski-Krastanov growth. Selforganized growth of nanostructures. Growth 1D and 0D nanostructures on prepatterned surfaces.
* 4. Litography.
Basic principles. EUV litography, E-beam litography, nanoimprint lithography, stamping techniques. Ion etching. Micromachining
* 5. Nanomanipulations using STM and AFM techniques.
Basic principles of operation. Manipulation with single atoms and moleculesl, local anodic oxidation, AFM/STM litography.
Annotation
Methods of preparation of nanostructures - VPE, MBE, sputtering, laser ablatuion. Control of the growth, in-situ diagnostic.
Growth modes a phases, 2D, 1D a 0D growth, adsorption and diffusion on surface. Steady-state nucleation theory of TF,
Kinetic equations, KMC simulations of growth of low-dimensional objects. Litographic methods and nanomanipulations.
Methods of preparation of metal nanocrystalline materials - ECAP, HPT, powder metallurgy.