Structural characterization of H plasma-doped ZnO single crystals by positron annihilation spectroscopies
2010
Abstract
Nominally undoped, hydrothermally grown ZnO single crystals have been investigated before and after exposure to remote H plasma. Structural characterizations have been made by various positron annihilation spectroscopies (continuous and pulsed slow positron beams, conventional lifetime).
The content of bound hydrogen (H-b) before and after the remote H plasma treatment at the polished side of the crystals was determined at depths of 100 and 600 nm, respectively, using nuclear reaction analysis. At a depth of 100 nm, H-b increased from (11.8+-2.5) to (48.7+-7.6)x10^19 cm^-3 after remote H plasma treatment, whereas at 600 nm no change in H-b was observed.