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The Interaction of Extreme Ultraviolet (XUV) Laser Radiation with Various Surfaces

Publication at Faculty of Mathematics and Physics |
2010

Abstract

The desktop capillary-discharge Ne-like Ar laser (CDL) providing 10-µJ nanosecond pulses of coherent 46.9-nm radiation with a repetition rate up to 10 Hz was used to modify surfaces of various materials, e.g., metals, carbonaceous material and organic polymer. The purpose of this investigation is to found a correlation between the CDL-induced surface damage and physico-chemical properties of irradiated material (i.e., radiation attenuation length in the material, which is given mostly by elemental composition and density, cohesive energy and so on).

The influence of XUV radiation on the surfaces is estimated by Nomarski (DIC) microscope.