Three-Dimensional Hybrid Computer Modeling of Langmuir Probes of Finite Dimensions in Medium Pressure Plasmas
2010
Abstract
The diagnostic based on Langmuir probes is used both in low-temperature and high-temperature plasmas. The limitations of the theoretical description of the plasma-probe interaction can be overcome by the three-dimensional hybrid computer simulation.
In the contribution the influence of various geometries of both the probe and its dielectric holder on the electron flux to the probe is discussed.