This paper examines the dissolution behavior of the (111)A, (111)B, (110), and (100) surfaces of CdTe single crystals in aqueous H2O2-HI-C6H8O7 (citric acid) solutions. We determined the dissolution rate of the crystals as a function of temperature and solution concentration, located the composition regions of polishing and selective etchants, and studied the microstructure and roughness of surfaces polished with optimized etchants.
The etching behavior of CdTe is shown to depend on its crystallographic orientation.