Structured Ti/Hydrocarbon Plasma Polymer Nanocomposites Produced By Magnetron Sputtering with Glancing Angle Deposition

Abstract

Structured Ti/hydrocarbon plasma polymer nanocomposite films are deposited at a glancing angle by magnetron sputtering of titanium in an Ar/hexane mixture and by sequential magnetron sputtering of titanium and polypropylene. The surface chemistry of such films is tuned by adjusting the gas mixture composition.

The structure of the substrate may convert the morphology of organic films deposited at a glancing angle from continuous to nanostructured thin films.

Keywords

• glancing angle deposition
• nanocomposites
• nanostructures
• plasma polymerization
• sputtering