This study presents current state-of-the-art of deposited nanocomposite Metal/Plasma polymer films as well as the first experimental results on deposition of Au/ Poly(ethylene oxide)-like plasma polymers by simultaneous vacuum thermal degradation of polyethylene oxide (PEO) and RF magnetron sputtering of gold are presented. Au/PEO-like films were analyzed by UV-Vis transmittance, TEM and XPS.