Publication at Faculty of Mathematics and Physics |
2011
Abstract
The plasma source used in this work was designed to study the plasma polymerization process at pressures below 0.1 Pa. The source consists of the classical radio frequency, capacitive coupled tubular reactor enhanced by an external magnetic circuit.
The working gas is introduced into the discharge by a capillary. This forms a relatively localized zone of higher pressure, where the monomer is activated.
Due to the magnetic field, the plasma is constricted near the axis of the reactor with nearly collisionless gas flow. The main aim of this study was to provide characterization of this plasma source by means of a double Langmuir probe.