Publication at Faculty of Mathematics and Physics |
2011
Abstract
Low-temperature and low-pressure plasma was investigated by OES (optical emission spectroscopy) in the range 200-1100 nm. For displaying measured emission spectra and identification of spectrum lines the software Spectrum Analyzer was used.
Two modes of glow discharge present in the DC cylindrical magnetron apparatus which were previously researched by a mass spectrometer were studied by OES. The changes in the spectral range 300-600 nm during the transition between discharge modes are contributed to the emission of metal particles sputtered from the cathode material.