Publication at Faculty of Mathematics and Physics |
2012
Abstract
The films of Pt nanoclusters were deposited by means of gas aggregation cluster source. At pressure of 100 Pa in the aggregation chamber and magnetron current of 0.2 A, highly porous films of metallic Pt clusters having average diameter of 4 nm are deposited as witnessed by transmission electron microscopy and X-ray diffraction.
The deposition rate as measured by spectroscopic ellipsometry is approximately 1 nm/s. These results are promising in respect to possible use of this deposition technique for the fabrication of nanocomposite materials for diverse technological applications.