Publikace na Matematicko-fyzikální fakulta |
2012
Abstrakt
We present results of the Langmuir probe measurements in the cylindrical magnetron apparatus in this paper. Measurements were performed in low-temperature and low-pressure neon plasma.
This work aims to study the impact of different values of macroparameters (e.g. discharge current, the strength of the magnetic field, pressure) on plasma microparameters (floating potential, plasma potential, electron density). The radial profiles of plasma parameters were obtained from Langmuir probe characteristics.
New results of neon plasma are mutually complementary and well comparable with previous measurements in argon.