Abstrakt
The results of 2D particle and 3D particle/fluid hybrid simulations are presented. We investigated a plasma sheath formed near substrates of different shapes and showed the influence of magnetic field on the sheath structure and particle fluxes to the substrate.
The studied solids were a cylindrical and a planar probe and a grooved planar substrate. The object of interest was idealized three-component plasma containing electrons and one species of positive and negative ions.
This composition simulates frequently used plasma mixtures containing electronegative gas (e.g. oxygen or chlorine) and rare gas (e.g. argon). We used a simplified plasma composition to show general properties of electronegative plasmas interacting with solids.
The effects of the presence of negative ions were investigated together with the effects of magnetic field. The simulations of plasma-solid interaction are useful not only for many plasma material treatment applications but also for an analysis of plasma probe diagnostics.