Publication at Faculty of Mathematics and Physics |
2013
Abstract
A simple and compact gas aggregation cluster and nanoparticle source based on a planar magnetron (Haberland type) without mass separation was characterized. Such source produces a beam of neutral, positively and negatively charged particles that are dragged by a buffer gas expanding from the aggregation chamber.
Sizes, speeds and charges of nanoparticles have been determined using a combination of TEM micrographs, electrostatic deflection setup and numeric modeling. The strong dependence of the velocity of the nanoparticles on their size was confirmed both experimentally and by modeling.