Comparison of the EDFs and macroscopic properties in the cylindrical magnetron discharges of direct and inverted designs | Charles Explorer

Comparison of the EDFs and macroscopic properties in the cylindrical magnetron discharges of direct and inverted designs

Publikace na Matematicko-fyzikální fakulta |

2005

Abstrakt

Comparison of the EDFs and macroscopic properties in the cylindrical magnetron discharges of direct and inverted designs

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