A comparison of polyatomic ion deposited, RF magnetron sputtered and plasma polymer organosilicon films | Charles Explorer

A comparison of polyatomic ion deposited, RF magnetron sputtered and plasma polymer organosilicon films

Publication at Faculty of Mathematics and Physics, Central Library of Charles University |

2004

Abstract

A comparison of polyatomic ion deposited, RF magnetron sputtered and plasma polymer organosilicon films

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