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Rf sputtering of composite SiOx/plasma polymer films and their basic properties
Publication at Faculty of Mathematics and Physics
|
2001
5 people
Abstract
Rf sputtering of composite SiOx/plasma polymer films and their basic properties
People
person
prof. RNDr. Hynek Biederman DrSc.
Faculty of Mathematics and Physics
person
Danka Slavínská
Faculty of Mathematics and Physics
person
Ing. Vitaliy Stelmashuk
Person without faculty affiliation
person
Andrei Choukourov
Person without faculty affiliation
person
Y. Pihosh
Person without faculty affiliation
