RF magnetron sputtering of polytetrafluoroethylene under various conditions,In:Proceedings of the 3rd International Conference on Coatings on Glass, Maastricht Eds.A.Meinema, C.I.M.A. Spee, M.A. Aegerter, Universal Press, Veenendaal
2000
Abstract
RF magnetron sputtering of polytetrafluoroethylene under various conditions