Abstrakt
The influence of the unevenness of substrates immersed into plasma on plasma surface interactions was studied by the combination of multidimensional fluid modelling and particle simulation connected together in iterative hybrid code. The fluid part of our model consisted of continuity equations for all charged species and Poisson's equation.
The non self-consistent particle simulation technique was used both for the calculation of local electron energy distribution function and for the derivation of quantities characterising plasma surface interaction. This approach enabled us to study in detail the structure of the plasma near metal substrates with complex geometries, i.e. planar substrates covered by a variety of hemispherical protrusions.
The main attention was devoted to the influence of substrate unevenness in both macroscopic and microscopic spatial scales on both metal ions and ions of background gas propagation to the substrate.