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Deposition of Pt and Sn doped CeOx layers on silicon substrate

Publikace na Matematicko-fyzikální fakulta |
2013

Tento text není v aktuálním jazyce dostupný. Zobrazuje se verze "en".Abstrakt

Radio Frequency Magnetron Sputtering is used to elaborate CeOx layers doped with platinum and/or tin on a SiO2/Si substrate. Morphology, chemical composition and crystallographic structures were investigated by Transmission Electron Microscopy.

The presence of nanoparticles of mainly ceria and metallic platinum is exhibited.