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Langmuir Probe Measurements in Electronegative RF Plasma

Publication at Faculty of Mathematics and Physics |
2013

Abstract

In this article we present Langmuir probe characteristics measured in hollow cathode plasma jet system powered by RF (radiofrequency) generator on frequency 13.56 MHz. Data were obtained in argon and in argon with admixture of iodine I2.

First results show the effect of negative iodine ions present in plasma.