Publication at Faculty of Mathematics and Physics |
2014
Abstract
Particle computer modelling technique was used to examine sheaths near solids in plasma composed of three kinds of charged particles: e{, Ar+ and O{. First of all, we describe our 2D particle model and present comparison of IV characteristics obtained by this model with OML theory.
Afterwards, sheath in the vicinity of biased cylindrical probe is examined for dierent values of electronegativity. We also explored the situation when two cylindrical probes with their sheaths are close to each other | which eects come into play and how much the results are in uenced by electronegativity of plasma.