Abstrakt
Clusters that grow into nanoparticles near the magnetron target of the gas aggregation cluster source (GAS) may acquire electric charge by collecting electrons and ions or through other mechanisms like secondary-or photo-electron emissions. The region of the GAS close to magnetron may be considered as stationary plasma.
The steady state charge distribution on nanoparticles can be determined by means of three possible models-fluid model, kinetic model and model employing Monte Carlo simulations-of cluster charging. In the paper the mathematical and numerical aspects of these models are analyzed in detail and close links between them are clarified.
Among others it is shown that Monte Carlo simulation may be considered as a particular numerical technique of solving kinetic equations. Similarly the equations of the fluid model result, after some approximation, from averaged kinetic equations.
A new algorithm solving an in principle unlimited set of kinetic equations is suggested. Its efficiency is verified on physical models based on experimental input data.