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Langmuir Probe Diagnostic in Gas Aggregation Cluster Source

Publikace na Matematicko-fyzikální fakulta |
2016

Tento text není v aktuálním jazyce dostupný. Zobrazuje se verze "en".Abstrakt

Deposition parameters and spatial variations of plasma parameters have been investigated in gas aggregation cluster source (GAS) with planar magnetron. Special construction of axially movable gas aggregation chamber in combination with radially movable Langmuir probe allows us to obtain 2D profiles of plasma parameters.

In addition to probe diagnostic, we used quartz-crystal microbalance (QCM), mass spectrometer, and optical emission spectroscopy (OES) for simultaneous monitoring of plasma composition and deposition conditions. Measurements were performed in pure argon and in argon with oxygen admixture.