Publication at Faculty of Mathematics and Physics |
2017
Abstract
Spatial profiles of plasma parameters were investigated in "diagnostic" gas aggregation cluster source (GAS). Nylon-sputtered nanoparticles (NPs) were prepared by means of GAS based on a planar RF magnetron with a Nylon target, which was sputtered in pure Ar.
Plasma polymer particles originated in an aggregation chamber and travelled to a main (deposition) chamber with a gas flow through an orifice. The spatial profiles of plasma parameters were obtained by means of radially movable heated probe and thanks to special construction of axially movable gas aggregation chamber.
Two situations were studied: (1) plasma without presence of nanoparticles and (2) plasma with production of nanoparticles.