Publication at Faculty of Mathematics and Physics |
2018
Abstract
The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which was proposed to be used in conditions when insulating films are being deposited on the probe and, consequently, classical Langmuir probe method fails. Recently an extension of this method called PDHAM - phase delay harmonic analysis method - applicable also to pulsed discharges was proposed.
In this contribution we study the possible limitations of this new method and present the comparison of the PDHAM with the time-resolved Langmuir probe in pulsed planar magnetron discharge in nonreactive regime, when no insulating film was deposited on the probe.