Publication at Faculty of Mathematics and Physics |
2019
Abstract
Two-dimensional particles in cells with Monte Carlo collision models are used to describe the behaviour of a plasma sheath in a multi-component plasma. An electronegative O-2/Ar plasma is assumed, and planar or cylindrical substrates are used in the simulations.
The aim of the study is to clarify the influence of plasma composition, pressure and substrate geometry on sheath formation and the behaviour of charged species in both the steady-state and dynamic regimes in multi-component plasmas.