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Plasma Diagnostics of Hollow Cathode Plasma-jet for Deposition of Iron Oxide Thin Films

Publication at Faculty of Mathematics and Physics |
2019

Abstract

The perspectives of iron oxide films and it sulfidation for dye-sensitized solar cell (DSSC) are reviewed. The iron oxide thin films were prepared by the hollow cathode plasma jet sputtering with the admixture of the oxygen in the argon working gas and with the iron nozzle as the sputtering target.

The discharge is powered by the constant current source in the continuous mode and by the constant voltage source in the pulsed mode. Plasma composition was measured by the mass spectrometer.

Moreover, SEM and Raman spectra of films are presented.