Abstrakt
ZrNb nanometric multilayer films having periodicity (L) from 6 to 167 nm were irradiated at ambient temperature by carbon and silicon ions with low and high fluences. The implanted ion profiles, mechanical properties, and irradiation damage were studied by secondary ion mass spectrometry (SIMS), nanoindentation, X-ray diffraction (XRD), and scanning transmission electron microscopy (STEM).