Publication at Faculty of Mathematics and Physics |
2020
Abstract
We present the diagnostic results of surfatron-generated plasma at different experimental conditions: chamber pressure, distance between the RF probe and the nozzle exit. The surfatron is a microwave plasma source for the ignition of surfacewave-sustained discharges.
We used commercial surfatron (Sairem) and microwave generator with the maximum power of 1200 W. The characteristics of the generated plasma showed that the surfatron plasma source can generate low-temperature plasma in pressure ranging from 1 Pa up to 200 Pa.
Mixtures of Ar (carrier gas), N2 and O2 (reactive gases) were used. The diagnostics of plasma was performed by means of Sobolewski probe measurement and optical emission spectroscopy.