NANOSTRUCTURED FILMS OF PLASMA POLYMERIZED HEXAMETHYLDISILAZANE AND LACTIC ACID DEPOSITED BY ATMOSPHERIC PLASMA JET
Abstract
In this work, composite layers of hexamethyldisilazane (HMDSN) and lactic acid (LA) were prepared using chemical vapor deposition process by a nitrogen atmospheric pressure plasma jet source. The HMDSN vapours were introduced into the plasma jet.
Varying LA admixture was added into the jet in the form of aerosol. The chemical composition, morphology and wettability of resulting films were studied.
Infrared spectra and XPS analysis show both Si-O like and hydrocarbon structures. With increasing amount of LA admixture, the oxidation of the layers increases.
The morphology of the films was measured with SEM. The films prepared with no LA have a foam-like structure.
With increasing amount of LA the structure changes into more fractal-like. The X-ray diffraction analysis suggests the presence of amorphous SiO2 domains in the films.
The films exhibited superhydrophobic properties that can be modified by the post-treatment of the samples in DBD discharge.