Abstrakt
In this communication, a new gas aggregation cluster source is introducedequipped with post cylindrical magnetron. The rotation of magnetic circuitimproves the usage of cylindrical copper target in terms of its homogenousconsumption.
Copper nanoparticles were successfully synthesized. Their de-position rate fluctuates at slow rotations of magnetic circuit.
Cyclic trappingand release of nanoparticles from electrostatic capture zones are likely re-sponsible for this effect. The instabilities are not observed at higher rotationspeeds.
The argon flow is found to be very complex within the cluster source;however, it seems crucial forits operation. The efficiency oftransport of nanoparticles andtheir size increase with gasflow.
The highest values ofdeposition rate of around19 mg/h are obtained.