Abstrakt
This study is focused on the investigation of plasma parameters in reactive HiPIMS with iron target in Ar+O2 gas mixture for two different configurations - conventional HiPIMS and hybrid system HiPIMS assisted with the electron cyclotron wave resonance (ECWR) discharge. In reactive HiPIMS+ECWR configuration a discharge could be maintained at working gas pressure lower than typical for conventional reactive HiPIMS.
Due to reduced pressure the plasma parameters such as electron temperature and ion flux density differ from common HiPIMS. The measurements were performed using an iron target in Ar/O2 atmosphere.
Plasma parameters have been studied as a function of varying oxygen flow rate during magnetron sputtering process. The diagnostics of plasma was performed by means of RF planar ion flux probe at the position of the substrate.