Publikace na Matematicko-fyzikální fakulta |
2022
Abstrakt
We report a fabrication process and characterization measurements of single crystal silicon micro-wire resonators to be used for study of quantum turbulence in superfluid 4He at millikelvin temperatures. Our devices are single standing goal-post-shaped silicon structures with a width and height of the order of 7 microns.
Vapour-deposited superconducting aluminium film of 120 nm thickness is used for magneto-motive drive of the resonators. In the window of each chip, two such devices of different dimensions are placed 30 µm to 1 mm apart, with the intent to study interaction due to pinned quantized vortices.
With resonant frequencies below 10 kHz, the devices reach quality factors of ALMOST EQUAL TO 2 x 10 4 in cold helium vapour.