Abstrakt
We measured plasma parameters (excitation temperature, electron density, rotational and vibrational temperature) in non-segmented cylindrical cathode magnetron by optical emission spectroscopy (OES). Admixture of He+N2+CO2 gases in ratios of 3:2:1 is deployed for plasma study by means of OES diagnostics in a regime of the magnetic field.
The objective of study is to understand effect of the gas mixture He+N2+CO2 on plasma parameters. The rotational temperature (Trot), vibrational temperature (Tvib), and electron density (ne) were calculated using spectral lines which were obtained through OES.
This work also aims to investigate the validity of the excitation temperature (Texc) by OES as an alternative to the electron temperature (Te). The whole results of emission spectroscopy in a mixture of He+N2+CO2 are analyzed by changing magnetic field (in Tesla), current (in mA), pressure (Pa), keeping flow rate (sccm) constant.