Plasma Diagnostics of Titanium Nitride for Plasmonic Study Generated Through Hollow Cathode Plasma Jet
2022
Abstract
This work demonstrate plasma diagnostics study of TiN plasma generated through hollow cathode plasma jet in DC discharge by changing power and changing flow rate keeping constant pressure of 30 Pa in both cases. Plasma parameters like electron temperature (Te) or electron density (ne) give vital insights knowledge about film growth and effect of different processing parameters on film deposition.
The Langmuir probe was deployed in our discharge chamber for acquiring information about plasma parameters.