Abstract
Thin films are commonly used in many micro-electromechanical systems (MEMS) which is connected to strict requirements for their mechanical properties. These are firmly connected to their thickness and grain size. Recrystallization and grain growth during heat treatment allows for altering the film properties while keeping the thickness.
Fe-based thin nanocrystalline films were prepared by DC magnetron sputtering. Their microstructure and surface morphology were studied by conventional and scanning transmission electron microscopy (TEM, STEM) equipped with Automated phase and orientation mapping (ACOM-TEM) and secondary electron detectors. The prepared films were annealed in-situ in TEM and the distribution of grain size at elevated temperatures was monitored. Moreover, the mechanisms of grain growth were directly observed. The experiment conditions were then reproduced using molecular dynamics (MD) simulations and the effects of grain orientation and geometry on the growth mechanisms were examined.