Nanocomposite Ag/C:H and Ag/C:H:O films were deposited by means of an unbalanced magnetron operated in a gas mixture of argon, hexane, and carbon dioxide. Infrared spectroscopy was employed to investigate the deposited layers in situ and to monitor film aging.
Oxidation processes observed by FTIR as an evolution of absorption bands caused by hydroxyl, carbonyl, carboxylate, and carbonate groups depend considerably on the content of the metallic phase.