Publication at Faculty of Mathematics and Physics |
2009
Abstract
Diffuse X-ray scattering on GaN films in coplanar (0004) diffraction was measured at ANKA (Karlsruhe, Germany) on a 6-circle diffractometer. From the set of experimental datawe could separate the contributions from pure screw and edge dislocations.
From the asymptotic behavior of the tails of the intensity profiles information on prevailing types of dislocation could be derived.