Publication at Faculty of Mathematics and Physics |
2009
Abstract
The influence of the unevenness of substrates immersed into plasma important for plasma-based treatment of materials was studied by computer experiment. For this analysis the combination of multidimensional fluid modelling and particle The influence of the unevenness of substrates immersed into plasma important for plasma-based treatment of materials was studied by computer experiment.
For this analysis the combination of multidimensional fluid modelling and particle simulation was used. The main attention was devoted to the influence of substrate geometry in both macroscopic and microscopic spatial scales on the local electric fields in plasma.