Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability
2009
Abstract
DC energized hollow cathode plasma jet system was examined by moveable Langmuir probe. Spatial distribution of electron concentration, plasma and floating potentials and mean electron energy were obtained from measured probe characteristics.
The radial dependence of plasma parameters was measured for distances from the system axis 0-120 mm. Temporal dependences of main plasma parameters for discharges in clean argon and argon-oxygen mixture were obtained from probe voltage current characteristics.
The system with Ti nozzle permits deposition of pure Ti as well as its compounds with active working gas admixtures such as O2, N2, etc. TiOx thin films were deposited onto glass substrates and examined by AFM and elipsometry.