Crystallization and Microstructure Evolution of TiO2 Thin Films and Powders Studied by XRD Total Pattern Fitting and Stress Analysis

Abstract

Different TiO2 samples - magnetron deposited amorphous and nanocrystalline thin films and powders - were annealed both off-situ and in-situ in XRD high-temperature chamber and their microstructure evolution with temperature and time was studied.

Keywords

• Crystallization
• Microstructure
• Evolution
• Films
• Powders
• Studied
• Total
• Pattern
• Fitting
• Stress
• Analysis