Physical properties of homogeneous TiO2 films prepared by high power impulse magnetron sputtering as a function of crystallographic phase and nanostructure (Art. No. 105204)

Abstract

Optical, photo-electrochemical, crystallographic and morphological properties of TiO2 thin films prepared by high power impulse magnetron sputtering at low substrate temperatures ({65 C) without post-deposition thermal annealing are studied.

Keywords

• Physical
• properties
• homogeneous
• films
• prepared
• power
• impulse
• magnetron
• sputtering
• function
• crystallographic
• phase
• nanostructure
• 105204