The Influence of Surface Treatment on Photocatalytic Activity of PE CVD TiO2 Thin Films

Abstract

' The deposition of TiO2 films was carried out in RF PECVD reactor at two different substrate temperatures with subsequent deposition of noble metal nanoparticles. Presence of metal clusters resulted in enhancement of the photocatalytic and antibacterial activity of the films.'

Keywords

• Influence
• Surface
• Treatment
• Photocatalytic
• Activity
• Films