Magnetron Deposited TiO2 Thin Films - Crystallization and Temperature Dependence of Microstructure and Phase Composition
2008
Abstract
Temperature dependence of microstructure and phase composition of two sets of nanocrystalline TiO2 thin Films magnetron deposited oil glass and silicon substrates have been Studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting.
After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 degrees C significant increase of crystallite size and transformation of anatase into rutile after 700 degrees C can be observed.