Nanocomposite structured thin films by magnetron sputtering at glancing angle deposition

Abstract

Nanostructured Mo and Ti thin films were deposited by magnetron sputtering in GLAD configuration. The possibility to deposit structured Ti/CH plasma polymer nanocomposites was also demonstrated.

Keywords

• Nanocomposite
• structured
• films
• magnetron
• sputtering
• glancing
• angle
• deposition