In-situ XRD astudy of thickness dependence of amorphous and nanocrystalline magnetron deposited TiO2 thin films

Abstract

annotation in the original language In-situ XRD astudy of thickness dependence of crystallization of amorphous titanium dioxide films

Keywords

• In-situ
• astudy
• thickness
• dependence
• amorphous
• nanocrystalline
• magnetron
• deposited
• films