Complex XRD studies of crystallization of amorphous and nanocrystalline magnetron-deposited TiO2 films with different thickness

Abstract

Complex XRD studies of crystallization of amorphous and nanocrystalline magnetron-deposited TiO2 films with different thickness

Keywords

• Complex
• studies
• crystallization
• amorphous
• nanocrystalline
• magnetron-deposited
• films
• different
• thickness